Medical Liquid Thermal Flow Sensors

Recently, our thermal flow sensors have been developed

for medical liquid applications. These new applications require low noise, high reproducibility, short response time, battery powered, potable and wearable, and low-cost disposable. Our sensors meet all these requirements because they are fabricated using a CMOS comparable technology and are based on a structure integrating a heater and a thermopile in a single chip.

   The following figure shows a typical characteristic line of 1% NaCl in DI water (stroke-physiological saline solution) flow measured by a liquid thermal flow sensor.