Utilizing the patented technology described in US Patent 11,601,111 B2

To fabricate MEMS AlScN film microphones

 

Tu Xiang Zheng 

 2/19/2025

Piezoelectric MEMS microphones offer several advantages over traditional capacitive MEMS microphones:

·        Self-Powered Operation: They do not require a DC bias voltage, simplifying circuit design and reducing power consumption.

·        High Sensitivity with Low Noise: Efficient charge generation enhances the signal-to-noise ratio (SNR), improving audio clarity.

·        Robust and Reliable: They exhibit excellent resistance to environmental factors such as humidity, temperature fluctuations, and mechanical shocks, making them suitable for harsh environments.

·        Broad Frequency Response: Capable of detecting a wide range of frequencies, from audible sounds to ultrasonic signals, enabling diverse applications.

These advantages make piezoelectric MEMS microphones suitable for various applications:

·        Consumer Electronics: Integrated into smartphones, laptops, and smart voice assistants for superior audio capture.

·        Industrial Monitoring: Used in acoustic leak detection, structural health monitoring, and predictive maintenance.

·        Medical Devices: Essential for hearing aids, digital stethoscopes, and ultrasonic diagnostic equipment.

·        IoT & Smart Systems: Enable voice-activated controls, smart home security, and environmental sensing in connected devices.

Low Power Piezoelectric MEMS Microphone Market Size

The global Low Power Piezoelectric MEMS Microphone market was valued at US$ 8285 million in 2023 and is anticipated to reach US$ 17530 million by 2030, witnessing a CAGR of 11.3% during the forecast period 2024-2030.

A MEMS piezoelectric film microphone, as illustrated in the above figure, can be fabricated using the pattern-built-in porous silicon wafer technology described in US Patent 11,601,111 B2. This advanced fabrication method enables the integration of high-performance materials while optimizing structural integrity and acoustic performance.